MEMS Sensor Test Solution

MEMS sensors integrate multiple physical fields such as mechanical, electrical, thermal, magnetic, and fluid dynamics. Testing requires the simultaneous application and precise control of multi-dimensional physical stimuli including acceleration, angular velocity, pressure, temperature, and magnetic fields. Acroview's MEMS sensor test solutions focus on integration, intelligence, high speed, and modularity, providing a series of solutions from sensor activation and calibration to burn-in testing. These help customers address core challenges in sensor testing while improving performance and reliability.

Product Advantages

  • Full-process test solutions from sensor activation, calibration to burn-in

  • Highly reliable, ultra-high precision physical excitation sources (high-precision turntable, high-precision pressure source)

  • Precise independent temperature control technology

  • Modular product design supports customized requirements

MEMS Inertial Sensor Activation Solution

Acroview's inertial sensor activation solution is designed for MEMS resonant structure oscillation startup and closed-loop locking (electrical activation). This activation test solution not only performs electrical performance testing on sensors and executes activation and OTP programming via SPI/PSI5 protocols, but also can be equipped with a turntable for preliminary testing and functional verification after activation.

MEMS Sensor Test Solution

MEMS Sensor Test Solution

Register Programming (SPI, PSI5)

MEMS Sensor Test Solution

MEMS Sensor Test Solution

OS Testing

MEMS Inertial Sensor Calibration Solution

An all-in-one fully automatic calibration, testing, and sorting machine for MEMS accelerometers and gyroscopes. Acroview's inertial sensor calibration solution supports multiple digital protocols such as PSI5, SPI, and I2C, and offers a high-efficiency dual-turntable test architecture that significantly improves test efficiency. It also supports high-temperature, ambient-temperature, low-temperature semi-automated testing, as well as military-grade metrology systems, providing a highly reliable test platform for MEMS sensor calibration.

MEMS Sensor Test Solution

Product AdvantageDescription
Register Programming• Professional programming equipment for writing to sensor registers
Mixed Signal Support

• Comprehensive DUT Board design supports simultaneous mixed-signal measurement

• Supports PSI5, SPI, I2C and other digital protocols

• Supports high-precision SMU source measure units

• Supports high-precision digital multimeters

Full Automation• Fully automatic loading/unloading, automatic tray distribution, and automatic bin sorting after testing
Precision Turntable Control

• High-precision turntable control: velocity accuracy and position accuracy

• Three-temperature testing

MEMS Sensor Test Solution

ParameterSpecification
Structural TypeU-OO configuration
FunctionThree-axis rate, position, angular vibration
Maximum Load Capacity50 kg
Maximum Load Dimensions350 mm × 350 mm × 400 mm ~ 550 mm × 550 mm × 600 mm
Position AccuracyAchievable ±2 arc seconds
Rate Range (Inner/Middle/Outer Axis)0.001 ~ 1500 °/s / 1200 °/s / 1000 °/s
Rate Accuracy and Stability1×10⁻³ ~ 2×10⁻⁵
Angular Acceleration (Inner/Middle/Outer Axis)Achievable 8000 °/s² / 4000 °/s² / 2500 °/s²
Angular Vibration Frequency (Inner/Middle/Outer Axis)Achievable 100 Hz / 50 Hz / 40 Hz
Angular Vibration Waveform Distortion5%

MEMS Sensor Three-Temperature Burn-In Test Solution

Residual stress in MEMS microstructures generated during packaging manufacturing needs to be released to prevent impact on performance indicators such as zero drift, non-linearity, and repeatability due to structural stress instability. Therefore, MEMS sensors require burn-in testing before leaving the factory. Acroview's fully automatic burn-in test system V9000, designed for MEMS sensor burn-in application requirements, supports three-temperature or ambient/high-temperature burn-in testing and sorting, and is the world's first large-scale parallel stackable burn-in test system.

MEMS Sensor Test Solution

MEMS Sensor Test Solution

MEMS Sensor Test Solution

MEMS Sensor Test Solution

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